What Does Noohapou Mean?
What Does Noohapou Mean?
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distant destinations: Static models are typically positioned remotely, rising Price and decreasing In general procedure effectiveness.
thirty% of its peak electricity consumption, giving our shoppers important reduction in operating costs and amplified trustworthiness.
With all the POU3500, you can accomplish unprecedented results in etch functionality, chamber uptime, lowered expense of ownership and fab space utilization – all while bettering your process trustworthiness.
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LAUDA-Noah will, for your purchaser's retrofit analysis, monitor and alter its fluid temperature Regulate profiles to match an present TCUs' to be able to ensure a sleek procedure integration by way of DAQ.
we're guided in our belief that prosperity With this competitive marketplace stems from providing customers with very engineered new merchandise and entire world course customer service.
The precision of your POU 3500 permits independent control of the process fluid temperature for the wafer chuck in just +/- 0.1 °C of established place, and the quickly reaction time with the procedure allows for optimum wafer-to-wafer repeatability through the etch procedure.
With our unit strategically mounted about six toes in the chamber, we attain a way more precise studying with the chuck temperature. This solution guarantees dependable temperature through the manufacturing large amount, leading to improved wafer-to-wafer CD uniformity.
huge Footprint: Static models occupy major Room within the fabrication tool location, reducing its efficiency.
Dynamic Temperature Management, as applied in devices like the LAUDA-Noah POU, can be an technique that senses the temperature of the process fluid returning from the method chamber’s wafer chuck (ESC) and dynamically adjusts the temperature from the equipped approach fluid based upon this authentic-time feedback.
The TEs' can switch directly from heating to cooling, get more info or visa-versa. they will activate & off even though from the heating or cooling mode and might boost or reduce the amount of heating or cooling devoid of switching in anyway.
greater than at any time, shrinking machine geometries, demanding new procedures as well as a highly competitive natural environment have to have temperature Handle programs that Incorporate rapidly and precise temperature Manage using an emphasis on lessened operating fees and improved trustworthiness.
verified; TEs' depict just one Component of a chiller's structure. The switching & Manage solutions employed by a chiller will effect the TEs' trustworthiness.
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We understand that fantastic solutions tend to be the results of wonderful customer feed-back and the appliance of impressive engineering. We try to generate value for our prospects via a procedure that allows The shopper impact our ambitions, aims, item developments and small business techniques.
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